| 1H | 2He | ||||||||||||||||
| 3 Li | 4Be | 5B | 6C | 7N | 8O | 9F | 10Ne | ||||||||||
| 11Na | 12Mg | 13Al | 14Si | 15P | 16S | 17Cl | 18Ar | ||||||||||
| 19K | 20Ca | 21Sc | 22Ti | 23V | 24Cr | 25Mn | 26Fe | 27Co | 28Ni | 29Cu | 30Zn | 31Ga | 32Ge | 33As | 34Se | 35Br | 36Kr |
| 37Rb | 38Sr | 39Y | 40Zr | 41Nb | 42Mo | 43Tc | 44Ru | 45Rh | 46Pd | 47Ag | 48Cd | 49In | 50Sn | 51Sb | 52Te | 53I | 54Xe |
| 55Cs | 56Ba | 57La | 72Hf | 73Ta | 74W | 75Re | 76Os | 77Ir | 78Pt | 79Au | 80Hg | 81Tl | 82Pb | 83Bi | 84Po | 85At | 86Rn |
| 87Fr | 88Ra | 89Ac | |||||||||||||||
| 58Ce | 59Pr | 60Nd | 61Pm | 62Sm | 63Eu | 64Gd | 65Tb | 66Dy | 67Ho | 68Er | 69Tm | 70Yb | 71Lu |
All elemental and alloy sputtering targets are vacuum-cast in argon unless otherwise quoted.
Alkali/Alkali Earth metals: H (Hydrogen), Li (lithium), Be (beryllium), Na (sodium), Mg (magnesium), Ca (calcium), Sr (strontium), Ba (barium) Lanthanide (Rare earth) metals: Sc (Scandium), Y (yttrium), La (lanthanum), Ce (cerium), Pr (praeseodymium), Nd (neodimium), Sm (samarium), Eu (europium), Gd (gadolinium), Tb (terbium), Dy (dysprosium), Ho (holmium), Er (erbium), Tm (thullium), Yb (ytterbium), Lu (lutetium) Refractory Metals: Ti (titanium), V (vanadium), Cr (chromium), Zr (zirconium), Nb (niobium), Mo (molybdenum), Hf (halfnium), Ta (tantalum), W (tungsten)
Transition metals: Mn (manganese), Fe (iron), Co (cobalt), Ni (nickel), Cu (copper), Zn (zinc)
Precious metals: Ru (ruthenium), Rh (rhodium), Pd (palladium), Ag (silver), Re (rhenium), Os (osmium), Ir (iridium), Pt (platinum), Au (gold) Light metals: B (boron), C (carbon), Al (aluminum), Si (silicon), Ga (gallium), Ge (germanium)
Ceramics: N (nitrides), O (oxides), F (Fluorides), P (phosphides), S (sulfides), Cl (chlorides)
Heavy Metals: Se (selenium), Cd (cadmium), In (indium), Sn (tin), Sb (antimony), Te (tellurium), Hg (mercury), Pb (lead), Bi (bismuth)
Aluminum Alloys: Al/Si, Al/Cu, Al/Si, Al/Si/Cu, Al/Li, Al/Mg, Al/Ti, Zn/Al
Gold Alloys: Au/Ag, Au/Be, Au/Ge, Au/Pd, Au/Pt, Au/Sn, Au/Zn
Cobalt Alloys: Co/Cr/Fe, Co/Fe, Co/Nb/Zr, Co/Ni, Co/Ta/Zr
Chrome Alloys: Ni/Cr, Fe/Cr
Copper Alloys: Cu/Ga, Cu/Ni, Cu/Sn
Iron Alloys: Fe/Al, Fe/Mn, Fe/Nd/B, Ni/Fe, Fe/Si, In/Sn
Iridium Alloys: Ir/Mn, Ir/Pt
Indium Alloys: Sb/In, Sb/In/Sn
Nickel Alloys: Ni/Ti, Ni/V, Ni/Zr
Osmium Alloys: Os/Ru
Platinum/Palladium Alloys: Pd/Ag, Pd/Pt, Pt/Ru
Rare-earth Alloys: Al/Nd, Ce/Gd, Co/Gd, Co/Sm, La/Mn, La/Ni, Nd/Fe
Titanium and Zirconium Alloys: Ti/W, Ti/Zr, Zr/Y
For a list of alloys made within the past 4
years, follow this link.