Material Safety Data Sheet

acc. to OSHA and ANSI
  Printing date 08/13/2004 Reviewed on 07/26/2004
  •   1 Identification of substance:

    • Product details:

    • Product name: Nickel sputtering target


    • Manufacturer/Supplier:

    • ACI ALLOYS, INC.
      1985 Las Plumas Avenue
      San Jose CA 95133

      (408) 259-7337

    • Emergency information:

    • Call Chemtrec at (800) 424-9300.
  •   2 Composition/Data on components:

    • Chemical characterization:

    •            Description: (CAS#)                                        
      Nickel (CAS# 7440-02-0), 100%
    • Identification number(s):

    • EINECS Number: 231-111-4

    • EU Number: 028-002-00-7
  •   3 Hazards identification

    • Hazard description: Xn Harmful

    • Information pertaining to particular dangers for man and environment

    • R 40 Limited evidence of a carcinogenic effect.
      R 43 May cause sensitization by skin contact.
    • Classification system

    • HMIS ratings (scale 0-4)


    •   (Hazardous Materials Identification System)

      Health (acute effects) = 0
      Flammability = 0
      Reactivity = 0
  •   4 First aid measures

    • General information No special measures required.

    • After inhalation Seek medical treatment in case of complaints.

    • After skin contact Generally the product does not irritate the skin.

    • After eye contact

    • Rinse opened eye for several minutes under running water. If symptoms persist, consult a doctor.
    • After swallowing Seek immediate medical advice.
  •   5 Fire fighting measures

    • Suitable extinguishing agents

    • Product is not flammable. Use fire fighting measures that suit the surrounding fire.
    • Protective equipment: No special measures required.
  •   6 Accidental release measures

    • Person-related safety precautions: Not required.

    • Measures for environmental protection:

    • Do not allow material to be released to the environment without proper governmental permits.
    • Measures for cleaning/collecting:

    • Dispose contaminated material as waste according to item 13.
    • Additional information:

    • See Section 7 for information on safe handling
      See Section 8 for information on personal protection equipment.
      See Section 13 for disposal information.
  •   7 Handling and storage


    • Handling

    • Information for safe handling:

    • Keep container tightly sealed.
      Store in cool, dry place in tightly closed containers.
      Ensure good ventilation at the workplace.
      Prevent formation of dust.
    • Information about protection against explosions and fires:

    • No special measures required.

    • Storage

    • Requirements to be met by storerooms and receptacles:

    • No special requirements.
    • Information about storage in one common storage facility: Not required.

    • Further information about storage conditions: None.
  •   8 Exposure controls and personal protection

    • Additional information about design of technical systems:

    • No further data; see item 7.

      Components with limit values that require monitoring at the workplace:

      Nickel and inorganic compounds, as Ni
                         mg/m3
      ACGIH TLV           1.5, A5-inhalable particulate (metal)
                          0.2, A1-inhalable particulate (insoluble compounds)
                          0.1, A4-inhalable particulate (soluble compounds)
      Austria             Carcinogen
      Denmark TWA         0.5
      Finland TWA         0.1 (skin) Carcinogen
      France VME          1; C3-Carcinogen
      Germany             Carcinogen
      Hungary             0.005-STEL; Carcinogen (insoluble compounds)
      Japan               1; 2B-Carcinogen
      Korea TLV           1.5
      Netherlands MAC-TGG 1; Carcinogen
                          1 (insoluble compounds)
      Poland TWA          0.25
      Russia              0.05-STEL
      Sweden NGV          0.5 (dust)
      Switzerland MAK-W   0.5; Carcinogen
      United Kingdom TWA  0.1
      USA PEL             1
    • Additional information: No data


    • Personal protective equipment

    • General protective and hygienic measures

    • The usual precautionary measures for handling chemicals should be followed.
    • Breathing equipment: Not required.

    • Protection of hands: Not required.

    • Eye protection: Safety glasses

    • Body protection: Protective work clothing.
  •   9 Physical and chemical properties:

    • General Information


    • Form: Target

    • Color: Silver-colored

    • Odor: Odorless

    •                                      Value/Range  Unit    Method      

    • Change in condition

    • Melting point/Melting range:                  1453 ° C

    • Boiling point/Boiling range:                  2730 ° C

    • Sublimation temperature / start:   Not determined


    • Flash point:                       Not applicable


    • Flammability (solid, gaseous)      Fine powder: highly flammable


    • Ignition temperature:              Not determined


    • Decomposition temperature:         Not determined


    • Danger of explosion:

    • Product does not present an explosion hazard.

    • Explosion limits:

    • Lower:                             Not determined

    • Upper:                             Not determined


    • Vapor pressure:                    Not determined


    • Density:               at   20 ° C           8.908 g/cm³


    • Solubility in / Miscibility with

    • Water:                             Insoluble
  •  10 Stability and reactivity

    • Thermal decomposition / conditions to be avoided:

    • Decomposition will not occur if used and stored according to specifications.
    • Materials to be avoided:

    • Acids
      Oxidizing agents
      Interhalogens
      Halogens
      Sulfur
      Ammonia
    • Dangerous reactions Very fine powder: spontaneously flammable in air.

    • Dangerous products of decomposition: Metal oxide fume
  •  11 Toxicological information

    • Acute toxicity:

    • Primary irritant effect:

    • on the skin: Powder: irritant effect

    • on the eye: Powder: irritant effect

    • Sensitization: Sensitization possible through skin contact.

    • Other information (about experimental toxicology):

    • Tumorigenic effects have been observed on tests with laboratory animals.
    • Subacute to chronic toxicity:

    • Nickel and nickel compounds may cause a form of dermatitis known as nickel itch.  They may also cause intestinal disorders, convulsions and asphyxia.  Airborne nickel contaminated dusts are regarded as carcinogenic to the respiratory tract.
    • Additional toxicological information:

    • To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.
      EPA-A: human carcinogen: sufficient evidence from epidemiologic studies to support a causal association between exposure and cancer.
      IARC-2B: Possibly carcinogenic to humans: limited evidence in humans in the absence of sufficient evidence in experimental animals.
      NTP-2: Reasonably anticipated to be a carcinogen: limited evidence from studies in humans or sufficient evidence from studies in experimental animals.
      ACGIH A5: Not suspected as a human carcinogen: Not suspected as a human carcinogen on the basis of properly conducted epidemiologic studies in humans.  Studies have sufficiently long follow-up, reliable exposure histories, sufficiently high dose, and adequate statistical power to conclude that exposure to the agent does not convey a significant risk of cancer to humans. Evidence suggesting a lack of carcinogenicity in experimental animals will be considered if it is supported by other relevant data.
      The Registry of Toxic Effects of Chemical Substances (RTECS) contains tumorigenic and/or carcinogenic and/or neoplastic data for components in this product.
  •  12 Ecological information:

    • General notes:

    • Do not allow material to be released to the environment without proper governmental permits.
  •  13 Disposal considerations


    • Product:

    • Recommendation

    • Consult state, local or national regulations to ensure proper disposal.

    • Uncleaned packagings:

    • Recommendation:

    • Disposal must be made according to official regulations.
  •  14 Transport information

    • Not a hazardous material for transportation.

    • DOT regulations:

    • Hazard class:             None


    • Land transport ADR/RID  (cross-border)

    • ADR/RID class:                None


    • Maritime transport IMDG:

    • IMDG Class:               None


    • Air transport ICAO-TI and IATA-DGR:

    • ICAO/IATA Class:          None


    • Transport/Additional information:

    • Not dangerous according to the above specifications.
  •  15 Regulations


    • Product related hazard informations:


    • Hazard symbols: Xn Harmful


    • Risk phrases:

    • 40 Limited evidence of a carcinogenic effect.
      43 May cause sensitization by skin contact.

    • Safety phrases:

    • 22 Do not breathe dust.
      36 Wear suitable protective clothing.

    • National regulations

    • All components of this product are listed in the U.S. Environmental Protection Agency Toxic Substances Control Act Chemical substance Inventory.
      This product contains a chemical known to the state of California to cause cancer or reproductive toxicity.

    • Information about limitation of use:

    • For use only by technically qualified individuals.
      This product contains nickel and is subject to the reporting requirements of section 313 of the Emergency Planning and Community Right to Know act of 1986 and 40CFR372.
  •  16 Other information:

    • Employers should use this information only as a supplement to other information gathered by them, and should make independent judgement of suitability of this information to ensure proper use and protect the health and safety of employees.  This information is furnished without warranty, and any use of the product not in conformance with this Material Safety Data Sheet, or in combination with any other product or process, is the responsibility of the user.