Material Safety Data Sheet

acc. to OSHA and ANSI
  Printing date 05/17/2006 Reviewed on 03/09/2006
  •   1 Identification of substance:
    •

    • Product details:


    • Product name:Aluminum sputtering target


    • Manufacturer/Supplier:

      ACI ALLOYS, INC.
      1985 Las Plumas Avenue
      San Jose CA 95133
      (408) 259-7337

      •

      • Emergency information:

        • Call Chemtrec at (800) 424-9300.
  •   2 Composition/Data on components:
    •

    • Chemical characterization:

      •            Description: (CAS#)                                        
      Aluminum (CAS# 7429-90-5): 100%
    • Identification number(s):

    • EINECS Number: 231-072-3
      •
  •   3 Hazards identification
    •

    • Hazard description: · Not applicable

    • Information pertaining to particular dangers for man and environment

      • Not applicable
    • Classification system

    • HMIS ratings (scale 0-4)


      •   (Hazardous Materials Identification System)
      Health (acute effects) = 0
      Flammability = 0
      Reactivity = 0
  •   4 First aid measures
    •

    • General information No special measures required.

    • After inhalation Seek medical treatment in case of complaints.

    • After skin contact Generally the product does not irritate the skin.

    • After eye contact

      • Rinse opened eye for several minutes under running water. If symptoms persist, consult a doctor.
    • After swallowing Seek medical treatment.
      •
  •   5 Fire fighting measures
    •

    • Suitable extinguishing agents

      • Special powder for metal fires. Do not use water.
    • For safety reasons unsuitable extinguishing agents Water

    • Special hazards caused by the material, its products of combustion or

      •   resulting gases:
      In case of fire, the following can be released:
      Metal oxide fume
    • Protective equipment:

      • Wear self-contained respirator.
      Wear fully protective impervious suit.
  •   6 Accidental release measures
    •

    • Person-related safety precautions:

      • Wear protective equipment. Keep unprotected persons away.
    • Measures for environmental protection:

      • Do not allow material to be released to the environment without proper governmental permits.
    • Measures for cleaning/collecting: Pick up mechanically.

    • Additional information:

      • No dangerous substances are released.
      See Section 8 for information on personal protection equipment.
  •   7 Handling and storage
    •


    • Handling

    • Information for safe handling:

      • No special precautions are necessary if used correctly.
    • Information about protection against explosions and fires:

      • No special measures required.

    • Storage

    • Requirements to be met by storerooms and receptacles:

      • No special requirements.
    • Information about storage in one common storage facility:

      • Do not store together with acids.
      Store away from strong bases.
    • Further information about storage conditions:

      • Store in cool, dry conditions in well sealed containers.
  •   8 Exposure controls and personal protection
    •

    • Additional information about design of technical systems:

      • No further data; see item 7.

      Components with limit values that require monitoring at the workplace:
    • Additional information: No data


    • Personal protective equipment

    • General protective and hygienic measures

      • The usual precautionary measures for handling chemicals should be followed.
    • Breathing equipment: Not required.

    • Protection of hands: Not required.

    • Eye protection: Safety glasses

    • Body protection: Protective work clothing.
      •
  •   9 Physical and chemical properties:
    •

    • General Information


    • Form: Target

    • Color: Silver-colored

    • Odor: Odorless

    •                                      Value/Range  Unit    Method      

    • Change in condition

    • Melting point/Melting range:                 660.1 ° C

    • Boiling point/Boiling range:                  2450 ° C

    • Sublimation temperature / start:   Not determined


    • Flash point:                       Not applicable


    • Ignition temperature:              Not determined


    • Decomposition temperature:         Not determined


    • Danger of explosion:

      • Product does not present an explosion hazard.

    • Explosion limits:

    • Lower:                             Not determined

    • Upper:                             Not determined


    • Vapor pressure:                    Not determined


    • Density:               at   20 ° C            2.70 g/cm³


    • Solubility in / Miscibility with

    • Water:                             Insoluble
      •
  •  10 Stability and reactivity
    •

    • Thermal decomposition / conditions to be avoided:

      • Decomposition will not occur if used and stored according to specifications.
    • Materials to be avoided:

      • Bases
      Acids
    • Dangerous reactions No dangerous reactions known

    • Dangerous products of decomposition: Metal oxide fume
      •
  •  11 Toxicological information
    •

    • Acute toxicity:

    • Primary irritant effect:

    • on the skin: Powder: irritant effect

    • on the eye: Powder: irritant effect

    • Sensitization: No sensitizing effects known.

    • Other information (about experimental toxicology):

      • Reproductive effects have been observed on tests with laboratory animals.
    • Subacute to chronic toxicity:

      • Aluminum may be implicated in Alzheimers disease.  Inhalation of aluminum containing dusts may cause pulmonary disease.
    • Subacute to chronic toxicity:

      • The Registry of Toxic Effects of Chemical Substances (RTECS) reports the following effects in laboratory animals:
      Blood - changes in serum composition (e.g. TP, bilirubin, cholesterol).
      Endocrine - hypoglycemia.
      Lungs, Thorax, or Respiration - fibrosis (interstitial)
      Lung, Thorax, or Respiration - cough.
      Lungs, Thorax, or Respiration - dyspnea.
      Nutritional and Gross Metabolic - weight loss or decreased weight gain.
      Reproductive - Effects on Newborn - behavioral.
      Reproductive - Effects on Newborn - physical.
      Reproductive - Effects on Newborn - other postnatal measures or effects.
    • Additional toxicological information:

      • To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.
      No classification data on carcinogenic properties of this material is available from the EPA, IARC, NTP, OSHA or ACGIH.
  •  12 Ecological information:
    •

    • General notes:

      • Do not allow material to be released to the environment without proper governmental permits.
  •  13 Disposal considerations
    •


    • Product:

    • Recommendation

      • Consult state, local or national regulations to ensure proper disposal.

    • Uncleaned packagings:

    • Recommendation:

      • Disposal must be made according to official regulations.
  •  14 Transport information
    •

      Not a hazardous material for transportation.

    • DOT regulations:

    • Hazard class:             None


    • Land transport ADR/RID  (cross-border)

    • ADR/RID class:            -


    • Maritime transport IMDG:

    • IMDG Class:               None


    • Air transport ICAO-TI and IATA-DGR:

    • ICAO/IATA Class:          None


    • Transport/Additional information:

      • Not dangerous according to the above specifications.
  •  15 Regulations
    •


    • Product related hazard informations:

      • Observe the general safety regulations when handling chemicals

    • National regulations

      • All components of this product are listed in the U.S. Environmental Protection Agency Toxic Substances Control Act Chemical substance Inventory.
      All components of this product are listed on the Canadian Domestic Substances List (DSL).

    • Information about limitation of use:

      • For use only by technically qualified individuals.
  •  16 Other information:
    •

      Employers should use this information only as a supplement to other information gathered by them, and should make independent judgement of suitability of this information to ensure proper use and protect the health and safety of employees.  This information is furnished without warranty, and any use of the product not in conformance with this Material Safety Data Sheet, or in combination with any other product or in combination with any other product or process, is the responsibility of the user.